INVESTIGATION OF REACTIVE DIFFUSION IN THIN-FILM SYSTEM CU-TI

被引：24

作者：

GERSHINSKII, AE ^{[1
]}

KHOROMENKO, AA ^{[1
]}

CHEREPOV, EI ^{[1
]}

机构：

[1] ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1975年 / 31卷 / 01期

关键词：

D O I：

10.1002/pssa.2210310107

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：61 / 70

页数：10

共 18 条

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[3] EIFERT JR, 1968, T METALL SOC AIME, V242, P66
[4] REDUCTION OF THERMALLY GROWN SIO2 BY AL FILMS
GERSHINSKII, AE
KHOROMENKO, AA
EDELMAN, FL
[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1974, 25 (02): : 645 - 651
[5] GERSHINSKII AE, 1973, IAN SSSR NEORG MATER, V9, P1741
[6] Determination of the phase structure of metallic protective coatings by anodic dissolution.
Glazunov, A
[J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1935, 31 (02): : 1262 - 1267
[7] GUY AG, 1969, T METALL SOC AIME, V245, P2293
[8] HAUFFE K, 1963, REAKTIONEN FESTEN ST, V2
[9] HEUMANN T, 1967, Z METALLKD, V58, P168
[10] HEUMANN T, 1970, 7 VORTR MET DDR DRES, P129