USE OF SURFACE CHARGING IN X-RAY PHOTOELECTRON SPECTROSCOPIC STUDIES OF ULTRATHIN DIELECTRIC FILMS ON SEMICONDUCTORS

被引：57

作者：

LAU, WM

机构：

来源：

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D O I：

10.1063/1.101450

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：338 / 340

页数：3

共 7 条

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