SPUTTERING OF A POLYMER LAYER DEPOSITED ON METAL SUBSTRATES

被引：9

作者：

EMMOTH, B

MLADENOV, GM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 12期

关键词：

D O I：

10.1063/1.331982

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：7119 / 7123

页数：5

共 14 条

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[8] PHOTON-EMISSION ENHANCEMENT COMPARED WITH THE SPUTTERING RATE DURING THIN-FILM SPUTTERING [J].

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