CONCENTRATION PROFILES AND SPUTTERING YIELDS MEASURED BY OPTICAL RADIATION OF SPUTTERED PARTICLES

被引：21

作者：

BRAUN, M ^{[1
]}

EMMOTH, B ^{[1
]}

BUCHTA, R ^{[1
]}

机构：

[1] RES INST PHYS,S-10405 STOCKHOLM,SWEDEN

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1976年 / 28卷 / 1-2期

关键词：

D O I：

10.1080/00337577608233030

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：77 / 83

页数：7

共 28 条

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