PLASMA ETCH ANISOTROPY - THEORY AND SOME VERIFYING EXPERIMENTS RELATING ION-TRANSPORT, ION ENERGY, AND ETCH PROFILES

被引：75

作者：

ZAROWIN, CB

机构：

来源：

关键词：

D O I：

10.1149/1.2119905

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1144 / 1152

页数：9

共 9 条

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[4] MADER H, 1980, MAY EL SOC M ST LOUI
[5] MIZUTANI T, 1981, TECH DIGEST IEDM DEC
[6] REINBERG AR, 1981, OCT EL SOC M DENV
[7] THEORY OF PLASMA CHEMICAL-TRANSPORT ETCHING OF GOLD IN A CHLORINE PLASMA
ZAROWIN, CB
[J]. THIN SOLID FILMS, 1981, 85 (01) : 33 - 42
[8] ZAROWIN CB, 1983, MAY EL SOC M SAN FRA
[9] ZAROWIN CB, 1981, OCT EL SOC M DENV