APPLICABILITY OF THE RF-ONLY MODE IN A QUADRUPOLE MASS-SPECTROMETER FOR DIRECT ANALYSIS OF KEV IONS

被引:7
作者
HIROKI, S [1 ]
KANEKO, K [1 ]
MURAKAMI, Y [1 ]
机构
[1] EBARA RES CORP,FUJISAWA 251,KANAGAWA,JAPAN
关键词
D O I
10.1016/0042-207X(95)00168-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper describes an applicability of a quadrupole mass spectrometer (QMS) for direct analysis of high energy ions up to 3 keV without decelerating fields. The QMS uses an rf-only mode in which only an rf voltage is applied to the quadrupole, although the conventional QMS applies the coincident de and rf voltages to the quadrupole. On the rf-only mode, the rf voltage is determined by a small triangular stability zone in the Mathieu stability diagram, where the point a = 0 and q = 7.547 in the a-q plane centers on the bottom of the triangle zone and the resolution of 104 is expected. The mass spectrum for air of 3 ke V ion beams was obtained on the rf-only mode, where the O-2 peak indicated the half-height resolution of 48. It was concluded that the rf-only mode is applicable for direct analysis of keV energy order ions, although further research to eliminate the conventional q < 0.9 related large peak is essential and the elimination will be realized using the pre-filter.
引用
收藏
页码:1445 / 1447
页数:3
相关论文
共 8 条
[2]  
Dawson P.H., 1976, QUADRUPOLE MASS SPEC
[3]   THE 2ND STABILITY REGION OF THE QUADRUPOLE MASS FILTER .1. ION OPTICAL-PROPERTIES [J].
DAWSON, PH ;
YU, BQ .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1984, 56 (01) :25-39
[4]   HYDROGEN ISOTOPE ANALYSIS BY QUADRUPOLE MASS-SPECTROMETRY [J].
ELLEFSON, RE ;
MODDEMAN, WE ;
DYLLA, HF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03) :1062-1067
[5]  
HIROKI S, IN PRESS VACUUM
[6]  
MCLACHLAN NW, 1947, THEORY APPLICATION M
[7]   THE TRANSMISSION PROPERTIES OF AN RF-ONLY QUADRUPOLE MASS FILTER [J].
MILLER, PE ;
DENTON, MB .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1986, 72 (03) :223-238
[8]   DAS ELEKTRISCHE MASSENFILTER ALS MASSENSPEKTROMETER UND ISOTOPENTRENNER [J].
PAUL, W ;
REINHARD, HP ;
VONZAHN, U .
ZEITSCHRIFT FUR PHYSIK, 1958, 152 (02) :143-182