AMORPHIZATION OF NIOBIUM FILMS BY BORON ION-IMPLANTATION

被引：38

作者：

LINKER, G

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING | 1985年 / 69卷 / 01期

关键词：

D O I：

10.1016/0025-5416(85)90379-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：105 / 110

页数：6

共 13 条

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