ELECTRONIC SPUTTERING OF SOLID N-2 AND O-2 - A COMPARISON OF NONRADIATIVE RELAXATION PROCESSES

被引:29
作者
ROOK, FL [1 ]
JOHNSON, RE [1 ]
BROWN, WL [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1016/0039-6028(85)90769-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:625 / 639
页数:15
相关论文
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