CHEMICAL VAPOR-DEPOSITION OF STRUCTURAL CERAMIC MATERIALS

被引：7

作者：

DOHERTY, JE ^{[1
]}

机构：

[1] PRATT & WHITNEY AIRCRAFT,ADV MAT RES & DEV LAB,E HARTFORD,CT 06108

来源：

JOM-JOURNAL OF METALS | 1976年 / 28卷 / 06期

关键词：

D O I：

10.1007/BF03354285

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

页码：6 / 10

页数：5

共 18 条

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[5]

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[6] STRUCTURAL PROPERTIES OF VAPOR DEPOSITED SILICON NITRIDE [J].

KOHLER, WA .

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LYDTIN H, 1970, 2ND P INT C CVD, P71

[8] SUPPRESSION OF IONIC CONTAMINATION DURING SILICON-NITRIDE DEPOSITION [J].

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[9]

MCADAMS WH, 1954, HEAT TRANSMISSION, P153

[10]

MESSIER DR, 1970, CERAM B, V49, P216

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