THE EFFECT OF HYDROGEN PLASMA ON THE PROPERTIES OF INDIUM TIN OXIDE-FILMS

被引：6

作者：

MAJOR, S ^{[1
]}

BHATNAGAR, MC ^{[1
]}

KUMAR, S ^{[1
]}

CHOPRA, KL ^{[1
]}

机构：

[1] INDIAN INST TECHNOL,DEPT PHYS,THIN FILM LAB,NEW DELHI 110016,INDIA

来源：

关键词：

D O I：

10.1557/JMR.1988.0723

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：723 / 728

页数：6

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BARR, TL .

[2]

Bennet H.E., 1967, PHYS THIN FILMS, V4, P1

[3]

CHOPRA KL, 1982, THIN SOLID FILMS, V102, P1

[4]

Drude P, 1900, PHYS Z, V1, P161

MAJOR, S ;

KUMAR, S ;

BHATNAGAR, M ;

CHOPRA, KL .