SIMULTANEOUS ANALYSIS OF LOW-Z IMPURITIES IN THE NEAR-SURFACE REGION OF SOLID MATERIALS BY HEAVY-ION ELASTIC RECOIL DETECTION (HIERD)

被引：12

作者：

GRIGULL, S

BEHRISCH, R

KREISSIG, U

HARZ, M

机构：

[1] FORSCHUNGSZENTRUM ROSSENDORF EV,INST IONENSTRABLPHYS & MAT FORSCH,D-01314 DRESDEN,GERMANY

[2] TECH UNIV DRESDEN,INST HALBLEITER & MIKROSYST TECH,D-01169 DRESDEN,GERMANY

来源：

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1995年 / 353卷 / 5-8期

关键词：

D O I：

10.1007/BF00321327

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A HIERD setup (HI-ERD = heavy ion elastic recoil detection) is introduced including a semiconductor Delta E-E telescope for the detection of hydrogen and helium isotopes and a Bragg Ionization Chamber (BIC) for the identification of heavier recoils. An optimum forward scattering geometry with respect to maximum analyzable depth and sensitivity is determined experimentally as well as by calculations for the analysis of oxygen and hydrogen using 35 MeV Cl-35 incident ions. As a relevant application of the method, the Na content of borosilicate glass is investigated in samples subject to anodic bonding procedures.

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页码：578 / 581

页数：4

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