PROPERTIES OF (TI1-XALX)N COATINGS FOR CUTTING TOOLS PREPARED BY THE CATHODIC ARC ION PLATING METHOD
被引:117
作者:
TANAKA, Y
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机构:STANFORD UNIV, CTR MAT RES, STANFORD, CA 94305 USA
TANAKA, Y
GUR, TM
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机构:STANFORD UNIV, CTR MAT RES, STANFORD, CA 94305 USA
GUR, TM
KELLY, M
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机构:STANFORD UNIV, CTR MAT RES, STANFORD, CA 94305 USA
KELLY, M
HAGSTROM, SB
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机构:STANFORD UNIV, CTR MAT RES, STANFORD, CA 94305 USA
HAGSTROM, SB
IKEDA, T
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机构:STANFORD UNIV, CTR MAT RES, STANFORD, CA 94305 USA
IKEDA, T
WAKIHIRA, K
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机构:STANFORD UNIV, CTR MAT RES, STANFORD, CA 94305 USA
WAKIHIRA, K
SATOH, H
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机构:STANFORD UNIV, CTR MAT RES, STANFORD, CA 94305 USA
SATOH, H
机构:
[1] STANFORD UNIV, CTR MAT RES, STANFORD, CA 94305 USA
[2] KOBE STEEL LTD, DIV CUTTING TOOL, UOZUMI, AKASHI 674, JAPAN
[3] KOBE STEEL LTD, MAT RES LAB, NISHI KU, KOBE 65122, JAPAN
来源:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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1992年
/
10卷
/
04期
关键词:
D O I:
10.1116/1.577742
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
(Ti,Al)N coatings with several Ti/Al ratios were deposited on Si and WC-Co substrates by the cathodic arc ion plating method. The crystal structure was found to be cubic B1 type, which is isostructural with the titanium-based nitrides. Morphology of the (Ti0.4Al0.6)N and TiN films was investigated, using transmission and scanning electron microscopy. The films seemed to have a less columnar structure than expected. The (Ti,Al)N films containing less than 75 mol % AlN had higher hardness than for the pure TiN films. Similarly, (Ti,Al)N coatings displayed superior oxidation resistance at elevated temperatures. Overall, (Ti,Al)N coated cutting tools offer significantly better performance characteristics compared to the tools with TiN coatings.