SUBMICRON PERIODIC STRUCTURES PRODUCED ON POLYMER SURFACES WITH POLARIZED EXCIMER LASER ULTRAVIOLET-RADIATION

被引:89
作者
BOLLE, M
LAZARE, S
LEBLANC, M
WILMES, A
机构
[1] UNIV BORDEAUX 1, PHOTOCHIM & PHOTOPHYS MOLEC LAB,CNRS,URA 348, 351 COURS LIBERAT, F-33405 TALENCE, FRANCE
[2] UNIV BORDEAUX 1, DEPT MICROSCOPIE ELECTR, F-33405 TALENCE, FRANCE
[3] DUPONT CO LUX SA, DEPT RES & DEV, L-2984 CONTERN, LUXEMBOURG
关键词
D O I
10.1063/1.106588
中图分类号
O59 [应用物理学];
学科分类号
摘要
For the first time, pure laser induced periodic structures (without any ablation or any larger structure) of submicron size (spacing and amplitude of 0.2-mu-m) are developed on polymer surfaces [poly(ethylene terephthalate), poly(butylene terephthalate) and polystyrene] by irradiation with one thousand pulses of the polarized beam of the excimer laser (193 and 248 nm). Fluence is below the ablation threshold and must be chosen in a narrow window which depends on the polymer and the wavelength. The obtained relief is observed by SEM, TEM and characterized by ellipsometry. Structures are obtained also by irradiation of thin films (2000 angstrom) coated on silicon wafers.
引用
收藏
页码:674 / 676
页数:3
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