A HIGH-RATE SPUTTERING PROCESS FOR THE FORMATION OF HARD FRICTION-REDUCING TIN COATINGS ON TOOLS

被引:106
作者
MUNZ, WD
HOFMANN, D
HARTIG, K
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D O I
10.1016/0040-6090(82)90215-2
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T [工业技术];
学科分类号
08 ;
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页码:79 / 86
页数:8
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