SURFACE STUDY OF PLASMA-POLYMERIZED AND UV-POLYMERIZED STYRENE FILMS USING SCANNING FORCE MICROSCOPY AND IN-SITU PHOTOELECTRON-SPECTROSCOPY

被引:9
作者
SCHELZ, S
SCHUHLER, N
RICHMOND, T
OELHAFEN, P
机构
[1] Institut für Physik der Universität Basel, 4056 Basel
关键词
PHOTOELECTRON SPECTROSCOPY; PLASMA PROCESSING AND DEPOSITION; POLYMERS; SURFACE ROUGHNESS;
D O I
10.1016/0040-6090(95)06655-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Polymeric styrene films with thicknesses ranging from a few nanometres up to 3 mu m have been prepared by various techniques, such as UV polymerization, spin coating, d.c.- and r.f.-plasma deposition. These films have been characterized by in-situ photoelectron spectroscopy (PES) and scanning force microscopy (SFM) in order to study the electronic structure and the surface topography, respectively. The electronic structure of the films prepared by plasma- and photo-polymerization is very similar to the structure of conventionally synthesized polystyrene films. The plasma-polymerized films showed a surprisingly low roughness of <0.4 nm r.m.s. over a varied range of parameters and deposition techniques, i.e. r.f., d.c. anodic and d.c. cathodic plasma polymerization. Above 1 mu m film thickness, the roughness drastically increases up to about 2-3 nm. SFM measurements of spin-coated polystyrene films exhibited a surface topography and surface roughness similar to the plasma-polymerized films. A drastically different surface topography was found for the UV-polymerized styrene films. This difference in surface topography is discussed in detail together with the information obtained from the in-situ PES results.
引用
收藏
页码:133 / 139
页数:7
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