INSITU ELECTRON-SPECTROSCOPY ON POLYMERIC FILMS PREPARED BY RF PLASMA POLYMERIZATION - STYRENE AND HYDROGEN STYRENE GAS-MIXTURES AS PROCESS GASES

被引：11

作者：

SCHELZ, S

EITLE, J

STEINER, R

OELHAFEN, P

机构：

[1] Institut für Physik der Universität Basel

来源：

APPLIED SURFACE SCIENCE | 1991年 / 48-9卷

关键词：

D O I：

10.1016/0169-4332(91)90348-N

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Carbon-based thin films have been prepared by a parallel-plate RF plasma polymerization (RFPP) technique. The films have been characterized by in situ electron spectroscopy and infrared spectroscopy. Special attention has been given to the admixture of hydrogen or deuterium to the styrene monomer and to surface treatments by means of a hydrogen plasma. In addition, a comparison is given of polystyrene films prepared by RF plasma polymerization with a corresponding direct ion beam deposited (IBD) polystyrene film prepared at low ion energy.

引用

页码：301 / 306

页数：6

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