AMORPHOUS HYDROGENATED CARBON-FILMS ON SEMICONDUCTORS .1. ELECTRONIC-PROPERTIES OF THE INTERFACE

被引:30
作者
UGOLINI, D [1 ]
EITLE, J [1 ]
OELHAFEN, P [1 ]
WITTMER, M [1 ]
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 06期
关键词
D O I
10.1007/BF00617856
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:549 / 558
页数:10
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