AMORPHOUS HYDROGENATED CARBON-FILMS ON SEMICONDUCTORS .2. MICROSTRUCTURAL PROPERTIES OF THE INTERFACE

被引：22

作者：

WITTMER, M ^{[1
]}

UGOLINI, D ^{[1
]}

EITLE, J ^{[1
]}

OELHAFEN, P ^{[1
]}

机构：

[1] UNIV BASEL,INST PHYS,CH-4056 BASEL,SWITZERLAND

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 06期

关键词：

D O I：

10.1007/BF00617857

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：559 / 566

页数：8

共 14 条

[1] STRUCTURE, OPTICAL-PROPERTIES AND DECOMPOSITION KINETICS OF SPUTTERED HYDROGENATED CARBON [J].

CRAIG, S ;

HARDING, GL .

THIN SOLID FILMS, 1982, 97 (04) :345-361

[2] HARD CARBON COATINGS WITH LOW OPTICAL-ABSORPTION [J].

DISCHLER, B ;

BUBENZER, A ;

KOIDL, P .

APPLIED PHYSICS LETTERS, 1983, 42 (08) :636-638

[3] INTERFACE MODIFICATIONS FOR IMPROVING THE ADHESION OF ALPHA-C-H FILMS TO METALS [J].

GRILL, A ;

MEYERSON, B ;

PATEL, V .

JOURNAL OF MATERIALS RESEARCH, 1988, 3 (02) :214-218

[4]

HIRSCH P, 1977, ELECTRON MICROS, P503

[5] SILICIDE FORMATION BY THERMAL ANNEALING OF NI AND PD ON HYDROGENATED AMORPHOUS-SILICON FILMS [J].

HUNG, LS ;

KENNEDY, EF ;

PALMSTROM, CJ ;

OLOWOLAFE, JO ;

MAYER, JW ;

RHODES, H .

APPLIED PHYSICS LETTERS, 1985, 47 (03) :236-238

[6] AMORPHOUS-CARBON FILMS AS RESIST MASKS WITH HIGH REACTIVE ION ETCHING RESISTANCE FOR NANOMETER LITHOGRAPHY [J].

KAKUCHI, M ;

HIKITA, M ;

TAMAMURA, T .

APPLIED PHYSICS LETTERS, 1986, 48 (13) :835-837

[7] INTERFACIAL ELECTRICAL-PROPERTIES OF ION-BEAM SPUTTER DEPOSITED AMORPHOUS-CARBON ON SILICON [J].

KHAN, AA ;

WOOLLAM, JA ;

CHUNG, Y ;

BANKS, B .

IEEE ELECTRON DEVICE LETTERS, 1983, 4 (05) :146-149

[8] HIGH-FREQUENCY CAPACITANCE-VOLTAGE AND CONDUCTANCE-VOLTAGE CHARACTERISTICS OF DC-SPUTTER DEPOSITED A-CARBON SILICON MIS STRUCTURES [J].

KHAN, AA ;

WOOLLAM, JA ;

CHUNG, Y .

SOLID-STATE ELECTRONICS, 1984, 27 (04) :385-391

[9] HYDROGENATED AMORPHOUS-CARBON DIELECTRIC COATINGS FOR MAGNETO-OPTIC DATA-STORAGE MEDIA [J].

ROBINSON, CJ ;

PAYNE, RN ;

BELL, AE .

JOURNAL OF APPLIED PHYSICS, 1988, 64 (09) :4646-4650

[10] CHARACTERIZATION OF DIAMOND-LIKE CARBON-FILMS AND THEIR APPLICATION AS OVERCOATS ON THIN-FILM MEDIA FOR MAGNETIC RECORDING [J].

TSAI, HC ;

BOGY, DB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1987, 5 (06) :3287-3312

← 1 2 →