HYDROGENATED AMORPHOUS-CARBON DIELECTRIC COATINGS FOR MAGNETO-OPTIC DATA-STORAGE MEDIA

被引:13
作者
ROBINSON, CJ [1 ]
PAYNE, RN [1 ]
BELL, AE [1 ]
机构
[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120
关键词
D O I
10.1063/1.341244
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4646 / 4650
页数:5
相关论文
共 20 条
[1]  
ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5
[2]  
Badzian A., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V683, P127, DOI 10.1117/12.936428
[3]  
BELL AE, 1987, OSA TOPICAL M OPTICA, V10, P138
[4]   RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].
BUBENZER, A ;
DISCHLER, B ;
BRANDT, G ;
KOIDL, P .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4590-4595
[5]   ROLE OF HARD CARBON IN THE FIELD OF INFRARED COATING MATERIALS [J].
BUBENZER, A ;
DISCHLER, B ;
BRANDT, G ;
KOIDL, P .
OPTICAL ENGINEERING, 1984, 23 (02) :153-156
[6]   DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1976, 38 (02) :L17-L19
[7]   GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1979, 58 (01) :107-116
[8]  
HOWARD J, COMMUNICATION
[9]   OPTICAL-PROPERTIES OF DIAMONDLIKE CARBON-FILMS - AN ELLIPSOMETRIC STUDY [J].
KHAN, AA ;
MATHINE, D ;
WOOLLAM, JA ;
CHUNG, Y .
PHYSICAL REVIEW B, 1983, 28 (12) :7229-7235
[10]   PROPERTIES OF HYDROGENATED CARBON-FILMS PRODUCED BY REACTIVE MAGNETRON SPUTTERING [J].
MCKENZIE, DR ;
BRIGGS, LM .
SOLAR ENERGY MATERIALS, 1981, 6 (01) :97-106