ROLE OF HARD CARBON IN THE FIELD OF INFRARED COATING MATERIALS

被引:21
作者
BUBENZER, A
DISCHLER, B
BRANDT, G
KOIDL, P
机构
关键词
OPTICAL INSTRUMENTS - Infrared;
D O I
10.1117/12.7973404
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Amorphous hydrogenated hard carbon (a-C:H) is a promising new optical coating material for passive infrared materials. It offers the combination of extreme hardness, chemical inertness, and optical transparency over a wide spectral range. The optical properties of rf-plasma deposited a-C:H coatings are compared with vacuum-evaporated infrared coatings. For many applications, a-C:H solves the problem of a mechanically and chemically resistant 8 to 12 mu m coating despite its moderate absorption in the 6 to 20 mu m range. The tunability of the refractive index between 1. 8 and 2. 2 allows single layer coatings on Si and Ge with zero reflection. State-of-the-art applications, possible future developments as well as remaining technological problems of a-C:H are discussed.
引用
收藏
页码:153 / 156
页数:4
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