FIELD EVAPORATION OF SILICON AND FIELD DESORPTION OF HYDROGEN FROM SILICON SURFACES

被引：22

作者：

KELLOGG, GL

机构：

来源：

PHYSICAL REVIEW B | 1983年 / 28卷 / 04期

关键词：

D O I：

10.1103/PhysRevB.28.1957

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1957 / 1964

页数：8

共 38 条

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