FIELD EVAPORATION OF SILICON AND FIELD DESORPTION OF HYDROGEN FROM SILICON SURFACES

被引:22
作者
KELLOGG, GL
机构
来源
PHYSICAL REVIEW B | 1983年 / 28卷 / 04期
关键词
D O I
10.1103/PhysRevB.28.1957
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1957 / 1964
页数:8
相关论文
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