ASYMMETRIC X-RAY BRAGG REFLECTION AND SHALLOW STRAIN DISTRIBUTION IN SILICON SINGLE-CRYSTALS

被引:28
作者
FUKUHARA, A [1 ]
TAKANO, Y [1 ]
机构
[1] HITACHI LTD,CENTR RES LAB,KOKUBUNJI,TOKYO,JAPAN
关键词
D O I
10.1107/S0021889877013508
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:287 / 290
页数:4
相关论文
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