PREPARATION OF NUCLEAR ACCELERATOR TARGETS BY FOCUSED ION-BEAM SPUTTER DEPOSITION

被引:9
作者
FOLGER, H
KLEMM, J
MULLER, M
机构
关键词
D O I
10.1109/TNS.1983.4332586
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1568 / 1572
页数:5
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