LASER-INDUCED COPPER PLATING

被引:19
作者
ALSUFI, AK [1 ]
EICHLER, HJ [1 ]
SALK, J [1 ]
RIEDEL, HJ [1 ]
机构
[1] SCHERING AG, D-1000 BERLIN 65, FED REP GER
关键词
D O I
10.1063/1.332404
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:3629 / 3631
页数:3
相关论文
共 3 条
[1]   INVESTIGATION OF LASER-ENHANCED ELECTROPLATING MECHANISMS [J].
PUIPPE, JC ;
ACOSTA, RE ;
VONGUTFELD, RJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (12) :2539-2545
[2]  
VONGUTFELD RJ, 1979, APPL PHYS LETT, V34, P617, DOI 10.1063/1.90637
[3]   LASER-ENHANCED PLATING AND ETCHING - MECHANISMS AND APPLICATIONS [J].
VONGUTFELD, RJ ;
ACOSTA, RE ;
ROMANKIW, LT .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1982, 26 (02) :136-144