GEOMETRIC AND ELECTRONIC-STRUCTURE OF EPITAXIAL IRON SILICIDES

被引:28
作者
ALVAREZ, J
DEPARGA, ALV
HINAREJOS, JJ
DELAFIGUERA, J
MICHEL, EG
OCAL, C
MIRANDA, R
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 04期
关键词
D O I
10.1116/1.578329
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The geometric and electronic structure of several iron silicide phases epitaxially grown on Si(111)7X7 have been characterized by means of surface sensitive techniques including scanning tunneling microscopy (STM), x-ray photoelectron spectroscopy, ion scattering spectroscopy (ISS), and ultraviolet photoelectron spectroscopy. The silicides were grown by solid-phase and reactive-deposition epitaxy, and their stability range was determined in situ as a function of iron coverage and annealing temperature. In particular, we have studied the phases appearing in the low-coverage low-temperature region. Additionally, the crystallites of the most important FeSi2 phases (gamma-FeSi2 and beta-FeSi2) have been characterized at atomic level with STM, while the surface termination was analyzed with ISS.
引用
收藏
页码:929 / 933
页数:5
相关论文
共 17 条
[11]  
Dusausoy P Y., 1971, ACTA CRYSTALLOGR B, V27, P1209, DOI [10.1107/S0567740871003765, DOI 10.1107/S0567740871003765]
[12]   METALLIZATION-INDUCED SPONTANEOUS SILICIDE FORMATION AT ROOM-TEMPERATURE - THE FE/SI CASE [J].
GALLEGO, JM ;
GARCIA, JM ;
ALVAREZ, J ;
MIRANDA, R .
PHYSICAL REVIEW B, 1992, 46 (20) :13339-13344
[13]   THE FE/SI(100) INTERFACE [J].
GALLEGO, JM ;
MIRANDA, R .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (03) :1377-1383
[14]  
MURARKA SP, 1985, SILICIDES VLSI APPLI
[15]   EPITAXY OF FLUORITE-STRUCTURE SILICIDES - METASTABLE CUBIC FESI2 ON SI(111) [J].
ONDA, N ;
HENZ, J ;
MULLER, E ;
MADER, KA ;
VONKANEL, H .
APPLIED SURFACE SCIENCE, 1992, 56-8 :421-426
[16]   STRUCTURAL AND ELECTRONIC-PROPERTIES OF METASTABLE EPITAXIAL FESI1+X FILMS ON SI(111) [J].
VONKANEL, H ;
MADER, KA ;
MULLER, E ;
ONDA, N ;
SIRRINGHAUS, H .
PHYSICAL REVIEW B, 1992, 45 (23) :13807-13810
[17]   GROWTH AND CHARACTERIZATION OF EPITAXIAL NI-SILICADE AND CO-SILICIDE [J].
VONKANEL, H .
MATERIALS SCIENCE REPORTS, 1992, 8 (05) :193-269