DYNAMIC CORRECTIONS IN MEBES-4500

[1] ELECTRON-BEAM LITHOGRAPHY USING MEBES-IV [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2734 - 2742

[2] ABBOUD F, 1992, P SPIE, V1671

[3] ABBOUD F, IN PRESS P SPIE

[4] BERGLUND CN, 1993, SPIE CRIT REV P CR, V51

[5] DUNBRACK S, 1991, P SOC PHOTO-OPT INS, P1464

[1] ELECTRON-BEAM LITHOGRAPHY USING MEBES-IV [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2734 - 2742

[2] ABBOUD F, 1992, P SPIE, V1671

[3] ABBOUD F, IN PRESS P SPIE

[4] BERGLUND CN, 1993, SPIE CRIT REV P CR, V51

[5] DUNBRACK S, 1991, P SOC PHOTO-OPT INS, P1464