FLASH TECHNOLOGY FOR CHARGE-COUPLED-DEVICE IMAGING IN THE ULTRAVIOLET

被引：13

作者：

JANESICK, JR

CAMPBELL, D

ELLIOTT, T

DAUD, T

机构：

来源：

OPTICAL ENGINEERING | 1987年 / 26卷 / 09期

关键词：

ULTRAVIOLET RADIATION;

D O I：

10.1117/12.7974163

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The introduction of the flash gate has made possible the fabrication of backside-illuminated CCDs with high sensitivity and stability throughout a wide range of ultraviolet and visible wavelengths (100 to 5000 A). It had been determined previously that the characteristics of the oxide layer beneath the gate are critical to the ultimate achievable CCD performance. However, by creating an improved oxide layer in conjunction with the flash gate, we are now able to produce CCDs with near-ideal uv performance. We present recent results and related background theory that optimize the flash gate specifically for application in the uv.

引用

页码：852 / 863

页数：12

共 15 条

[1] Blouke M. M., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V570, P82
[2] 800X800 CHARGE-COUPLED DEVICE IMAGE SENSOR
BLOUKE, MM
JANESICK, JR
HALL, JE
COWENS, MW
MAY, PJ
[J]. OPTICAL ENGINEERING, 1983, 22 (05) : 607 - 614
[3] CHARGE-COUPLED-DEVICE RESPONSE TO ELECTRON-BEAM ENERGIES OF LESS THAN 1 KEV UP TO 20 KEV
DAUD, T
JANESICK, JR
EVANS, K
ELLIOTT, T
[J]. OPTICAL ENGINEERING, 1987, 26 (08) : 686 - 691
[4] GHANDHI SK, 1983, VLSI FABRICATION PRI, P378
[5] HECHT M, 1986, FINAL REPORT CCD FLA
[6] Janesick J., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V570, P46
[7] Janesick J., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P350
[8] JANESICK J, 1986, P SOC PHOTO-OPT INS, V627, P543
[9] SCIENTIFIC CHARGE-COUPLED-DEVICES
JANESICK, JR
ELLIOTT, T
COLLINS, S
BLOUKE, MM
FREEMAN, J
[J]. OPTICAL ENGINEERING, 1987, 26 (08) : 692 - 714
[10] CHARGE-COUPLED DEVICE ADVANCES FOR X-RAY SCIENTIFIC APPLICATIONS IN 1986
JANESICK, JR
ELLIOTT, T
COLLINS, S
DAUD, T
CAMPBELL, D
GARMIRE, G
[J]. OPTICAL ENGINEERING, 1987, 26 (02) : 156 - 166

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