FORMATION OF COMPOUNDS BY HIGH-FLUX NITROGEN ION-IMPLANTATION IN TITANIUM

被引：52

作者：

RAUSCHENBACH, B

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1986年 / 21卷 / 02期

关键词：

D O I：

10.1007/BF01145500

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：395 / 404

页数：10

共 38 条

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[9] ION-BOMBARDMENT OF GROUP-IV ELEMENTAL METAL AND SYNTHETIC NITRIDE FILMS [J].

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[10]

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