A MONTE-CARLO CODE TO SIMULATE THE EFFECT OF FAST SECONDARY ELECTRONS ON K(AB) FACTORS AND SPATIAL-RESOLUTION IN THE TEM

被引：21

作者：

GAUVIN, R ^{[1
]}

LESPERANCE, G ^{[1
]}

机构：

[1] ECOLE POLYTECH,DEPT MET & GENIE MAT,CTR CARACTERISAT MICROSCOP MAT,MONTREAL H3C 3A7,QUEBEC,CANADA

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1992年 / 168卷

关键词：

MONTE CARLO; PRIMARY ELECTRONS; FAST SECONDARY ELECTRONS; K(AB) FACTORS; SPATIAL RESOLUTION;

D O I：

10.1111/j.1365-2818.1992.tb03258.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Fast secondary electrons (FSE), which result from inelastic scattering of incident electrons, are known to generate a significant number of X-rays for light elements, and also to degrade the spatial resolution of X-ray microanalysis in thin foils. A Monte Carlo program simulating the generation and diffusion of FSE in binary systems has been developed to study the effect of composition on k(AB) factors and spatial resolution. The effect of accelerating voltage and thickness is also presented.

引用

页码：153 / 167

页数：15

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