PERFORMANCE OF A NEW ION OPTICS FOR QUASISIMULTANEOUS SECONDARY ION, SECONDARY NEUTRAL, AND RESIDUAL-GAS MASS-SPECTROMETRY

被引：59

作者：

LIPINSKY, D ^{[1
]}

JEDE, R ^{[1
]}

GANSCHOW, O ^{[1
]}

BENNINGHOVEN, A ^{[1
]}

机构：

[1] UNIV MUNSTER,INST PHYS,DOMAGKSTR 75,D-4400 MUNSTER,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.572917

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：2007 / 2017

页数：11

相关论文

共 63 条

[1] SURFACE-ANALYSIS BY NONRESONANT MULTIPHOTON IONIZATION OF DESORBED OR SPUTTERED SPECIES
BECKER, CH
GILLEN, KT
[J]. ANALYTICAL CHEMISTRY, 1984, 56 (09) : 1671 - 1674
[2] BEHRISCH R, 1983, TOPICS APPLIED PHYSI, V52
[3] BENNINGH.A, 1965, ANN PHYS-BERLIN, V15, P113
[4] TANDEM MASS SPECTROMETER FOR SECONDARY ION STUDIES
BENNINGHOVEN, A
LOEBACH, E
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (01) : 49 - +
[5] DEVELOPMENTS IN SECONDARY ION MASS-SPECTROSCOPY AND APPLICATIONS TO SURFACE STUDIES
BENNINGHOVEN, A
[J]. SURFACE SCIENCE, 1975, 53 (DEC) : 596 - 625
[6] SECONDARY ION YIELDS NEAR 1 FOR SOME CHEMICAL COMPOUNDS
BENNINGHOVEN, A
MUELLER, A
[J]. PHYSICS LETTERS A, 1972, A-40 (02) : 169 - +
[7] STUDY OF SILICON-OXYGEN INTERACTION WITH STATICAL METHOD OF SECONDARY ION MASS SPECTROSCOPY (SIMS)
BENNINGHOVEN, A
STORP, S
[J]. APPLIED PHYSICS LETTERS, 1973, 22 (04) : 170 - 171
[8] BENNINGHOVEN A, 1978, 2784 LAND NORDRH WES
[9] BISPINCK H, COMMUNICATION
[10] Castaing R., 1962, J MICROSCOPIE, V1, P395

← 1 2 3 4 5 6 7 →