AS-GROWN CRYSTALLIZED THIN-FILMS ON BI(PB)-SR-CA-CU-O BY SINGLE-TARGET MAGNETRON SPUTTERING

被引：6

作者：

HAKURAKU, Y

HIGO, S

MIYAGI, D

OGUSHI, T

机构：

[1] Department of Electronics, Kagoshima University, Kagoshima

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 04期

关键词：

As-grown thin film; Bi(Pb)-Sr-Ca-Cu-0 system; C-axis orientation; De magnetron sputtering; Single-target;

D O I：

10.1143/JJAP.29.L600

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

As-grown crystallized superconducting thin films of Bi(Pb)-Sr-Ca-Cu-O have been prepared on MgO(100) at 620-720°C by dc magnetron sputtering using a single target. The targets used were BixPb1Sr2Ca2.2Cu3Oy(x=2.0 and 2.5) in nominal composition. The obtained films had a smooth surface and exhibited a high degree of c-axis orientation perpendicular to the substrate. The c-axis lattice constant of the films was controlled to the values of about 24, 31, 37 and 43 Å by changing the substrate temperature, respectively. As a result, the superconducting properties of the films were strongly affected by the substrate temperatures during film growth. These results also showed that the films with different c-axis lattice constants (i.e., different numbers of CuO2planes) were easily prepared by a simple single-target sputtering. © 1990 IOP Publishing Ltd.

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页码：L600 / L603

页数：4

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