ELECTROPLATED AND DRY-RELEASED METALLIC MICROSTRUCTURES FOR A LATERAL TUNNELING UNIT APPLICATION

被引：9

作者：

HIRANO, T ^{[1
]}

KOBAYASHI, D ^{[1
]}

FURUHATA, T ^{[1
]}

FUJITA, H ^{[1
]}

机构：

[1] UNIV TOKYO, INST IND SCI, MINATO KU, TOKYO 106, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1994年 / 33卷 / 02期

关键词：

MICROMACHINE; MICROACTUATOR; LATERAL TUNNELING UNIT (LTU); ATOMIC FORCE MICROSCOPE (AFM); ELECTROPLATING; DRY RELEASING;

D O I：

10.1143/JJAP.33.1202

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper presents a new method of fabricating a lateral tunneling unit (LTU), by dry releasing of electroplated structures. An LTU is an integrated tunneling current sensing unit that has a tunneling tip and a linear actuator for moving the tip. The new fabrication method has many advantages over the existing polycrystalline silicon structure and hydrofluoric acid (HF) wet release method, namely, use of a metallic material, thicker structure, higher yield, and a safer, easier, and faster process. New LTUs and LTU-AFM probes were successfully fabricated by this method. Gold and nickel were used as alternative structural materials. The electrolytic polishing method was proposed as a new post-release processing and was used to fabricate sharp needles. The comb-drive actuator of an LTU was operated and the characteristics were measured; the results showed that this actuator has good linearity.

引用

页码：1202 / 1208

页数：7