CALIBRATION OF VG ESCALAB MKII SPECTROMETER FOR XPS QUANTITATIVE-ANALYSIS

被引:11
作者
FLAMENT, O [1 ]
DRUET, E [1 ]
机构
[1] IBM FRANCE,DEPT 807-31U,224 BD J KENNEDY,BP 58,F-91102 CORBEIL ESSONNES,FRANCE
关键词
D O I
10.1016/0368-2048(90)80328-8
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Calibration of the VG ESCALAB MkII for different operating conditions has been performed. Two behaviours of the transmission function in the CAE mode were deduced using peak intensities of a pure Pt sample. The transmission factor can either be constant or proportional to E-n, where n = 0.65, depending on the experimental conditions. © 1990.
引用
收藏
页码:141 / 152
页数:12
相关论文
共 13 条
[1]   CALIBRATION OF ELECTROSTATIC ANALYZERS AND CHANNEL ELECTRON MULTIPLIERS USING LABORATORY SIMULATED OMNIDIRECTIONAL ELECTRON-BEAMS [J].
ARNOLDY, RL ;
GATS, DF ;
CHOY, LW ;
ISAACSON, PO .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (02) :172-177
[2]   METHODS FOR QUANTITATIVE-ANALYSIS IN XPS AND AES [J].
GRANT, JT .
SURFACE AND INTERFACE ANALYSIS, 1989, 14 (6-7) :271-283
[3]   AN EXPERIMENTAL AND THEORETICAL-STUDY OF THE TRANSMISSION FUNCTION OF A COMMERCIAL HEMISPHERICAL ELECTRON-ENERGY ANALYZER [J].
HUGHES, AE ;
PHILLIPS, CC .
SURFACE AND INTERFACE ANALYSIS, 1982, 4 (05) :220-226
[4]   ELECTRON TRAJECTORY ANALYSIS OF THE SPHERICAL-SECTOR ELECTROSTATIC SPECTROMETER - FOCUSING PROPERTIES AND MULTICHANNEL DETECTION CAPABILITY [J].
OSTERWALDER, J ;
SAGURTON, M ;
ORDERS, PJ ;
FADLEY, CS ;
HERMSMEIER, BD ;
FRIEDMAN, DJ .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1989, 48 (1-2) :55-99
[5]   QUANTITATIVE CHEMICAL-ANALYSIS BY ESCA [J].
PENN, DR .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 9 (01) :29-40
[6]   QUANTITATIVE SURFACE ANALYSIS BY X-RAY PHOTOELECTRON-SPECTROSCOPY [J].
POWELL, CJ ;
LARSON, PE .
APPLIED SURFACE SCIENCE, 1978, 1 (02) :186-201
[7]   RELATIVE INTENSITIES IN PHOTOELECTRON-SPECTROSCOPY OF ATOMS AND MOLECULES [J].
REILMAN, RF ;
MSEZANE, A ;
MANSON, ST .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 8 (05) :389-394
[8]   EXPERIMENTAL-STUDY OF THE ENERGY-DEPENDENCE OF TRANSMISSION IN PHOTOELECTRON SPECTROMETERS [J].
SCHARLI, M ;
BRUNNER, J .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1983, 31 (04) :323-334
[9]   HARTREE-SLATER SUBSHELL PHOTOIONIZATION CROSS-SECTIONS AT 1254 AND 1487EV [J].
SCOFIELD, JH .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 8 (02) :129-137
[10]   QUANTITATIVE XPS - THE CALIBRATION OF SPECTROMETER INTENSITY ENERGY RESPONSE FUNCTIONS .2. RESULTS OF INTERLABORATORY MEASUREMENTS FOR COMMERICAL INSTRUMENTS [J].
SEAH, MP ;
JONES, ME ;
ANTHONY, MT .
SURFACE AND INTERFACE ANALYSIS, 1984, 6 (05) :242-254