PHOTOELECTROCHEMICAL DEFECT DELINEATION IN GAAS USING HYDROCHLORIC-ACID

被引:3
作者
BHAT, R
机构
[1] Bell Communications Research, Murray, Hill, NJ, USA, Bell Communications Research, Murray Hill, NJ, USA
关键词
ELECTROLYTES - HYDROCHLORIC ACID;
D O I
10.1149/1.2114336
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The author reports on a PEC technique using dilute hydrochloric acid and illumination. Hydrochloric acid was chosen as the electrolyte because (i) it is commonly available, (ii) the anodic oxide which is formed continuously dissolves in it, and (iii) it does not attack gallium arsenide appreciably.
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页码:2284 / 2285
页数:2
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