MORPHOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS

被引:66
作者
BUCK, V
机构
关键词
D O I
10.1016/0043-1648(83)90073-X
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
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页码:281 / 288
页数:8
相关论文
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