LIMITS TO THE HARDNESS TESTING OF FILMS THINNER THAN 1-MU-M

被引：37

作者：

ROSS, JDJ ^{[1
]}

POLLOCK, HM ^{[1
]}

PIVIN, JC ^{[1
]}

TAKADOUM, J ^{[1
]}

机构：

[1] ORSAY CTR NUCL SPECTROMETRY & MASS SPECTROMETRY,F-91406 ORSAY,FRANCE

来源：

THIN SOLID FILMS | 1987年 / 148卷 / 02期

关键词：

D O I：

10.1016/0040-6090(87)90155-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：171 / 180

页数：10

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