NUMERICAL DETERMINATION OF THE ELECTROMECHANICAL FIELD FOR A MICRO SERVOSYSTEM

被引：4

作者：

FUJITA, H

IKOMA, T

机构：

[1] Institute of Industrial Science, University of Tokyo, Minatoku, Tokyo

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85042-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The present paper deals with the calculation of a combined electroelastic field. The Rayleigh-Ritz method is applied to obtain an approximate analytical solution. The total potential energy of both electric and elastic energy is minimized with respect to the parameters of an approximate compatible function assumed for the displacement. The function was chosen to satisfy boundary conditions. The bending of a silicon square diaphragm by the electrostatic force was determined. The result predicts a larger displacement than the simple model in which the enhancement of the electrostatic field was neglected. © 1990.

引用

页码：215 / 218

页数：4

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