AEROSOL JET ETCHING OF HG1-XCDXTE

被引：3

作者：

JURCIK, BJ

BROCK, JR

TRACHTENBERG, I

机构：

来源：

APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 17期

关键词：

D O I：

10.1063/1.103116

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Aerosol jet etching of Hg1-xCdxTe is reported using a Br2-CH3OH aerosol. The method demonstrates good anisotropy and the etching process induces no change in the electrical properties of the Hg1-xCdxTe.

引用

页码：1682 / 1684

页数：3

共 13 条

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (04) :2575-2579

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