HIGH-RATE GROWTH OF PURELY A-AXIS ORIENTED YBCO HIGH-T-C THIN-FILMS BY PHOTO-ASSISTED MOCVD

被引:30
作者
ZHONG, Q
CHOU, PC
LI, QL
TARALDSEN, GS
IGNATIEV, A
机构
[1] UNIV HOUSTON,TEXAS CTR SUPERCONDUCT,HOUSTON,TX 77204
[2] UNIV HOUSTON,CTR SPACE VACUUM EPITAXY,HOUSTON,TX 77204
来源
PHYSICA C | 1995年 / 246卷 / 3-4期
关键词
D O I
10.1016/0921-4534(95)00025-9
中图分类号
O59 [应用物理学];
学科分类号
摘要
The growth of purely a-axis oriented YBCO thin films on LaAlO3 (100) substrates with no template layer addition has been accomplished by photo-assisted MOCVD. In addition to the requirement of lattice-matched substrates, the difficulty of growth of purely a-axis oriented YBCO films with this processing technique has been overcome by utilizing three appropriate processing/growth factors: substrate temperature (T-s), total partial pressure of oxidizing gases O-2 and N2O (P(O-2 + N2O)), as well as high film growth rate. A high growth rate (up to 7000 Angstrom/min) has been accomplished through MOCVD growth assisted by photo-irradiation with tungsten-halogen lamps. Variance of the three factors leads to tailored growth of either a-axis, c-axis or [110] oriented growth for YBCO. The growth of a-axis YBCO thin films under different precursor flow rates also affects the film morphology.
引用
收藏
页码:288 / 296
页数:9
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