CRYSTAL ORIENTATION OF YBA2CU3O7-Y THIN-FILMS PREPARED BY RF-SPUTTERING

被引：26

作者：

ARIKAWA, T

ITOZAKI, H

HARADA, K

HIGAKI, K

TANAKA, S

YAZU, S

机构：

[1] Itami Research Laboratories, Sumitomo Electric Industries

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 12期

关键词：

OXIDE SUPERCONDUCTOR; YBA2CU3O7-Y THIN FILM; SPUTTERING; CRYSTAL ORIENTATION; MORPHOLOGY; SUBSTRATE TEMPERATURE;

D O I：

10.1143/JJAP.29.L2199

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of growth temperature on the crystallinity and morphology of YBa2Cu3O7-y thin films was investigated. Thin films were grown on MgO (100) single-crystal substrates by RF magnetron sputtering. Preferred orientations of thin films can be controlled by adjusting the substrate temperature, T(s); (100) a-axis oriented films were deposited at 540-degrees-C < T(s) < 550-degrees-C, (110) oriented films were deposited at 565-degrees-C < T(s) < 600-degrees-C and (001) c-axis oriented films were deposited above 610-degrees-C.

引用

页码：L2199 / L2202

页数：4

共 11 条

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