MICROSCOPIC OBSERVATION OF INTERFACE STRUCTURES OF YBACUO/MGO/YBACUO DOUBLE-HETEROEPITAXIAL THIN-FILMS BY TEM

被引:11
作者
SAKUTA, K [1 ]
IYORI, M [1 ]
KOBAYASHI, T [1 ]
MATSUI, M [1 ]
NAKAJIMA, M [1 ]
机构
[1] FURUKAWA ELECT CORP LTD,YOKOHAMA RES & DEV LAB,NISHI KU,YOKOHAMA 220,JAPAN
关键词
D O I
10.1109/20.133436
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have fabricated the YBaCuO/MgO/YBaCuO double-heterostructure(DHS) using conventional rf magnetron sputtering. The formation of (110)YBaCuO/(100)MgO/ (110)YBaCuO on (110)SrTiO3 substrate, and (001)YBaCuO/ (100)MgO/(100)YBaCuO and (001)YBaCuO/(100)MgO/(001) YBaCuO on (100)MgO substrate are demonstrated. According to the RHEED observations, each layer of the DHS was grown epitaxially. The cross sectional TEM observation of the (001)YBaCuO/(100)MgO(2nm)/(001) YBaCuO structure was carried out for characterizations of the heterostructure. The ultra-thin MgO layer grew island-shape. The MgO island formation was continuing and stimulated much more along with the top YBaCuO growth. The YBaCuO atomic arrange shape implied that the YBaCuO growth mechanism was the so-called atomic layer epitaxy.
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收藏
页码:1361 / 1364
页数:4
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