MICROMECHANICAL STRUCTURES FOR ELECTRON-BEAM AND ION-BEAM IRRADIATION PHENOMENA

被引：8

作者：

OGO, I

MACDONALD, NC

机构：

[1] CORNELL UNIV,SCH ELECT ENGN,ITHACA,NY 14853

[2] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587613

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3285 / 3288

页数：4

共 13 条

[1]

DUDAICEVS H, 7TH INT C SOL STAT S, P992

[2]

FEUERBAUM HP, 1979, SEM, V1, P285

[3] FRACTURE TESTING OF SILICON MICROELEMENTS INSITU IN A SCANNING ELECTRON-MICROSCOPE [J].

JOHANSSON, S ;

SCHWEITZ, JA ;

TENERZ, L ;

TIREN, J .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) :4799-4803

[4] TIME-RESOLVED SCANNING ELECTRON MICROSCOPY AND ITS APPLICATION TO BULK-EFFECT OSCILLATORS [J].

MACDONALD, NC ;

ROBINSON, GY ;

WHITE, RM .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) :4516-+

[5]

Mehregany M., 1991, Journal of Micromechanics and Microengineering, V1, P73, DOI 10.1088/0960-1317/1/2/001

[6]

MEIROVITCH L, 1985, ANAL METHODS VIBRATI

[7] YOUNGS MODULUS MEASUREMENTS OF THIN-FILMS USING MICROMECHANICS [J].

PETERSEN, KE ;

GUARNIERI, CR .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) :6761-6766

[8] STROBOSCOPIC SCANNING ELECTRON MICROSCOPY [J].

PLOWS, GS ;

NIXON, WC .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1968, 1 (06) :595-&

[9]

RAMAKER DE, 1982, DESORPTION INDUCED E, P70

[10]

SAMPSELL JB, 7TH INT C SOL STAT S, P24

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