6 DEGREE-OF-FREEDOM SCANNING SUPPORTS AND MANIPULATORS BASED ON PARALLEL ROBOTS

The exploitation of third generation SR sources heavily relies on accurate and stable positioning and scanning of samples and optical elements. In some cases, active feedback is also necessary. Normally, these tasks are carried out by serial addition of individual components, each of them providing a well-defined excursion path. On the contrary, the exploitation of the concept of parallel robots, structures in close cinematic chain, permits us to follow any given trajectory in the six-dimensional space with a large increase in accuracy and stiffness. At ESRF, the parallel robot architecture conceived some tens of years ago for flight simulators has been adapted to both actively align and operate optical elements of considerable weight and position small samples in ultrahigh vacuum. The performance of these devices gives results far superior to the initial specification and a variety of drive mechanisms are being developed to fit the different needs of the ESRF beamlines. © 1995 American Institute of Physics.