ZNO PROCESSING FOR INTEGRATED OPTIC SENSORS

[1] AMBERSLEY MD, 1980, THIN SOLID FILMS, V80, P183

[2] BULMER CH, 1983, OCT P EUR C INT OPT, P140

[3] DEFRANOULD P, 1981, 1981 P ULTR S IEEE N, P483

[4] HICKERNELL FS, 1980, 5TH P TOP M INT GUID

[5] HORSTHUIS WHG, 1985, SPRINGER SERIES OPTI, V48, P152

[6] OPTICAL-WAVEGUIDE MICRO-DISPLACEMENT SENSOR [J]. ELECTRONICS LETTERS, 1982, 18 (20) : 867 - 868

[7] INTEGRATED OPTICAL-TEMPERATURE SENSOR [J]. APPLIED PHYSICS LETTERS, 1982, 41 (02) : 134 - 136

[8] KHURIYAKUB BT, 1980, 1980 P ULTR S BOST, V2, P801

[9] CONTROLLED TEXTURE OF REACTIVELY RF-SPUTTERED ZNO THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (05) : 2787 - 2792

[10] PRESSURE AND ANGLE OF INCIDENCE EFFECTS IN REACTIVE PLANAR MAGNETRON SPUTTERED ZNO LAYERS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02): : 162 - 170

[1] AMBERSLEY MD, 1980, THIN SOLID FILMS, V80, P183

[2] BULMER CH, 1983, OCT P EUR C INT OPT, P140

[3] DEFRANOULD P, 1981, 1981 P ULTR S IEEE N, P483

[4] HICKERNELL FS, 1980, 5TH P TOP M INT GUID

[5] HORSTHUIS WHG, 1985, SPRINGER SERIES OPTI, V48, P152

[6] OPTICAL-WAVEGUIDE MICRO-DISPLACEMENT SENSOR [J]. ELECTRONICS LETTERS, 1982, 18 (20) : 867 - 868

[7] INTEGRATED OPTICAL-TEMPERATURE SENSOR [J]. APPLIED PHYSICS LETTERS, 1982, 41 (02) : 134 - 136

[8] KHURIYAKUB BT, 1980, 1980 P ULTR S BOST, V2, P801

[9] CONTROLLED TEXTURE OF REACTIVELY RF-SPUTTERED ZNO THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (05) : 2787 - 2792

[10] PRESSURE AND ANGLE OF INCIDENCE EFFECTS IN REACTIVE PLANAR MAGNETRON SPUTTERED ZNO LAYERS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02): : 162 - 170