TEMPERATURE DEPENDENCIES OF SENSITIVITY AND SURFACE CHEMICAL-COMPOSITION OF SNOX GAS SENSORS

被引：20

作者：

GAGGIOTTI, G ^{[1
]}

GALDIKAS, A ^{[1
]}

KACIULIS, S ^{[1
]}

MATTOGNO, G ^{[1
]}

SETKUS, A ^{[1
]}

机构：

[1] LITHUANIA ACAD SCI,INST SEMICOND PHYS,VILNIUS 232600,LITHUANIA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 25卷 / 1-3期

关键词：

CARBON MONOXIDE SENSORS; GAS SENSORS; TIN OXIDE;

D O I：

10.1016/0925-4005(95)85111-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The electrical resistivity response to CO gas exposure versus temperature has been measured for different types of SnOx-based gas sensors. The chemical composition of the sensor surfaces and the electronic structure of the valence band are investigated by X-ray photoelectron spectroscopy and scanning Auger microscopy techniques, with the aim of explaining resistivity changes in terms of the surface oxidation/reduction mechanism. The samples are treated by Ar+ sputtering, thermal annealing in UHV and oxygen at various temperatures up to 400 degrees C. An ultrathin Pt overlayer, which enhances the gas sensitivity in a low operating temperature range, is found to be very porous. The band-gap states induced by oxygen vacancies and adsorbed hydroxyl groups are revealed by valence-band spectra. The resistivity changes of the sensors due to exposure to reducing or oxidizing gases are caused more by the changes of the surface-defect density than by the variation of excess surface charge due to oxygen adsorption.

引用

页码：516 / 519

页数：4

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