ELECTRON-MICROSCOPE STUDY OF EPITAXIAL SILICON FILMS ON SAPPHIRE AND DIAMOND SUBSTRATES

被引：10

作者：

CULLIS, AG

BOOKER, GR

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

[2] UNIV OXFORD,DEPT MET,OXFORD,ENGLAND

来源：

THIN SOLID FILMS | 1976年 / 31卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(76)90354-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：53 / 67

页数：15

共 38 条

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[20] GROWTH AND STRUCTURE OF SEMICONDUCTING THIN-FILMS [J].

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