MECHANISTIC STUDIES OF THE DECOMPOSITION OF TRIMETHYLALUMINUM ON HEATED SURFACES

被引：95

作者：

SQUIRE, DW

DULCEY, CS

LIN, MC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.582976

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1513 / 1519

页数：7

共 16 条

[1]

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[9] 2 PHOTON RESONANCE ENHANCED MULTIPHOTON IONIZATION SPECTROSCOPY AND STATE ASSIGNMENTS OF THE METHYL RADICAL [J].

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[10]

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