PREPARATION OF IN2O3-SN (ITO) FILMS BY ELECTRON-BEAM DEPOSITION

被引：3

作者：

BICH, VT

DINH, NN

HOAI, TX

HOANG, NH

HONG, LV

MIEN, VD

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1987年 / 102卷 / 02期

关键词：

D O I：

10.1002/pssa.2211020255

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：K91 / K94

页数：4

共 9 条

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CHANG, NS ;

SITES, JR .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (09) :4833-4837

[2]

FAUGHMAN BW, 1980, DISPLAY DEVICES

[3] THIN-FILM ELECTROCHROMIC DISPLAY BASED ON TUNGSTEN BRONZES [J].

GREEN, M ;

SMITH, WC ;

WEINER, JA .

THIN SOLID FILMS, 1976, 38 (01) :89-100

[4]

LINERMAN ML, 1969, J ELECTROCHEM SOC, V116, P242

[5]

MIRKIN LI, 1961, SPRAVOCHNIK RENTGENO, P464

[6]

RAVIENDRA D, 1985, PHYS STATUS SOLIDI A, V88, pK83, DOI 10.1002/pssa.2210880165

[7] PREPARATION OF THIN FILMS OF SOME OXIDES BY PYROLYSIS METHOD [J].

RYABOVA, LA ;

SAVITSKA.YS .

THIN SOLID FILMS, 1968, 2 (1-2) :141-&

[8]

WEIKER RL, 1963, J APPL PHYS, V33

[9]

YAMAMOTO H, 1984, JAPAN J APPL PHYS, V23

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