SURFACE CHARACTERIZATION OF TI-IMPLANTED IRON BY XPS AND AES

被引:18
作者
IWAKI, M [1 ]
YABE, K [1 ]
SUZUKI, M [1 ]
NISHIMURA, O [1 ]
机构
[1] GOVT IND DEV LAB, SAPPORO, HOKKAIDO 06101, JAPAN
关键词
D O I
10.1016/S0168-583X(87)80031-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:150 / 153
页数:4
相关论文
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